Model AVS-4000 Automated High Vacuum Furnace
The Model AVS-4000 is a high-vacuum multi-atmosphere sealing furnace that is custom designed for automated sealing operations as one element of an integrated production system. The furnace is fully operational at temperatures up to 500°C, vacuum levels as low as 10-7 Torr and automatic selection and electronic control of up to three process gasses. This system may be tooled to seal MEMS devices and can be adapted for many sealing and soldering processes requiring low levels of residual moisture and gas together with close control of temperature, vacuum and pressure. Robotic tooling load and un-load from in-line transfer stations is optional, allowing for fully automatic production operation.
The Model AVS-4000 is a high-vacuum multi-atmosphere sealing furnace that is custom designed for automated sealing operations as one element of an integrated production system. The furnace is fully operational at temperatures up to 500°C, vacuum levels as low as 10-7 Torr and automatic selection and electronic control of up to three process gasses. This system may be tooled to seal MEMS devices and can be adapted for many sealing and soldering processes requiring low levels of residual moisture and gas together with close control of temperature, vacuum and pressure. Robotic tooling load and un-load from in-line transfer stations is optional, allowing for fully automatic production operation.
| Vacuum Pump Type | Turbomolecular Drag (optional Cryogenic Water Pump) |
| Minimum Vacuum Level | 1 x 10-7 torr (1 x 10-7 mbar) |
| Operating Temperature Range | 100 to 500°C |
| Thermal Work Zone | 50 in² (320 cm²) |
| Maximum Chamber Gas Pressure Level | 12 psig (1.8 bar) |
| Process Gasses (three inputs) | N2 required, (Ar, He, forming gas optional) @ 90 psig (7 bar) minimum pressure |
| Electrical Service | 208-240 volts, 110 amps, 50/60 Hz, 1 phase, 7 kilowatt average, 24 kilowatt peak |
| Cooling Water Required | 4 gpm (15 lpm) @ 20-25°C, 5 kilowatt capacity minimum |
| Compressed Air Required | 90 psig (7 bar) |
| Overall Size (W x D x H) | 77 x 53 x 81 in (195 x 135 x 210 cm) (includes optional HEPA enclosure) |
| Total Weight | 2650 lb (1200 kg) |
Specifications are subject to change.
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