Model 3130 Vacuum Pressure Furnace
The Model 3130 is a vacuum and pressure furnace that provides precise automatic control of heating to 500°C (1000°C optional) and cooling in an inert gas environment from vacuum levels of below 50 millitorr to pressures exceeding 50 psig. Process profiles are easily created, and the process data can be analyzed off-line. The system is used in both production and research environments for flux-free soldering, brazing, annealing and glass sealing of components and packages for microelectronic applications.
The Model 3130 is a vacuum and pressure furnace that provides precise automatic control of heating to 500°C (1000°C optional) and cooling in an inert gas environment from vacuum levels of below 50 millitorr to pressures exceeding 50 psig. Process profiles are easily created, and the process data can be analyzed off-line. The system is used in both production and research environments for flux-free soldering, brazing, annealing and glass sealing of components and packages for microelectronic applications.
| Operating Temperature Range | 100 to 500°C (1000°C optional) |
| Thermal Work Zone | 35 in² (225 cm²) maximum |
| Minimum Vacuum Level | < 50 millitorr (< 0.067 mbar) |
| Maximum Chamber Gas Pressure Level | 60 psig (5 bar) |
| Process Gasses | N2 required, (Ar He, forming gas optional) @ 90 psig (7 bar) minimum pressure |
| Electrical Service | 208-240 volts, 50/60 Hz, single phase, 60 amps, 5 kW average, 13 kW peak |
| Cooling Water Required | 2 gpm (8 lpm) @ 20-25°C, 2 kW minimum, 30 psig (2 bar) pressure differential |
| Work Surface Height | 38 in (96 cm) adjustable |
| Overall Size (W x D x H) | 54 x 43 x 43 in (137 x 109 x 135 cm) |
| Weight | 1200 lb (545 kg) |
Specifications are subject to change.
Download Datasheet for Model 3130 Vacuum Pressure Furnace
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