Model 5100 Vacuum Pressure Furnace

The Model 5100 is a vacuum and pressure furnace that provides precise automatic control of heating and cooling ramp rates. This system allows for heating up to 500°C and cooling in an inert gas environment from vacuum levels below 50 millitorr to pressures up to 40 psig. An unlimited number of process profiles can easily be created and stored in the controller. Process heating is provided over the entire work area by a close-coupled planar infrared heating element. The system is designed for high production flux-less void-free soldering.

Download the Data Sheet

Model 500 Data Sheet

  • Model-5100-Transparent.jpg
  • Model-5100-Lid Open_edited-1.jpg
  • Model 5100 lid seal tooling inside the chamber
  • Model 5100 illuminated viewport

QuikCool™ Option for SST Model 5100

Adding the QuikCool™ to the SST Model 5100 reduces cycle time and increases throughput of the package assembly process.  QuikCool™ is a patent pending auxiliary cooling unit designed to rapidly reduce temperature in an SST 5100 Vacuum Chamber. Click on the link below for more information.

QuikCool™ Auxiliary Cooling Unit


Void-Free Die Soldering

Void-free die and substrate solder attach is used to create a uniform thermal interface for high reliability microelectronic devices.

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Hermetic Package Sealing

Hermetic package sealing uses solder or glass to create a barrier to moisture which will damage sensitive electrical circuit components.

Learn More



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Opearting Temperature Range 100 to 500°C
Thermal Work Zone 12 x 12 in = 144 in² (30.5 x 30.5 cm = 930 cm²)
Minimum Vacuum Level < 50 millitorr (< .067 mbar)
Maximum Chamber Gas Pressure Level 40 psig (3.7 bar)
Process Gasses N2 required, (Ar He, forming gas optional) @ 90 psig (7 bar) minimum pressure. Formic acid generator (optional)
Electrical Service 208-240 volts, 50/60 Hz, three phase, 50 amps, 5 kW average, 20 kW maximum
380 volts, 50/60 Hz, three phase, 30 amps
Cooling Water Required 2 gpm (8 lpm) @ 20-25°C, 2 kW minimum, 30 psig (2 bar) pressure differential
Work Surface Height 39 in (99 cm)
Overall Size (W x D x H) 43 x 34 x 55 in (108 x 86 x 140 cm)
Weight 1000 lb (455 kg)

*Specifications are subject to change.