Model 3150 High Vacuum Furnace
The Model 3150 is a high vacuum furnace that provides advanced packaging capabilities in vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional). The clean-room compatible system may also be configured to allow for in-situ separation of lid and package, getter firing and sealing of MEMS packages. The Model 3150 utilizes a turbo-molecular drag pump for effective pumping of hydrogen gas molecules. An optional cryogenic water pump may be added to the system for processes requiring extremely low levels of residual water vapor.
The Model 3150 is a high vacuum furnace that provides advanced packaging capabilities in vacuum levels as low as 10-7 Torr, and temperatures up to 500°C (1000°C optional). The clean-room compatible system may also be configured to allow for in-situ separation of lid and package, getter firing and sealing of MEMS packages. The Model 3150 utilizes a turbo-molecular drag pump for effective pumping of hydrogen gas molecules. An optional cryogenic water pump may be added to the system for processes requiring extremely low levels of residual water vapor.
| Vacuum Pump Type | Turbomolecular Drag (optional Cryogenic Water Pump) |
| Minimum Vacuum Level | 1 x 10-7 torr (1 x 10-7 mbar) |
| Operating Temperature Range | 100 to 500°C (1000°C option) |
| Thermal Work Zone | 25 in² (160 cm²) |
| Maximum Chamber Gas Pressure Level | 12 psig (1.8 bar) |
| Process Gasses (three inputs) | N2 required, (Ar, He, forming gas optional) @ 90 psig (7 bar) minimum pressure |
| Electrical Service | 208-240 volts, 60 amps, 50/60 Hz, 1 phase, 5 kilowatt average, 15 kilowatt peak |
| Cooling Water Required | 2 gpm (8 lpm) @ 20-25°C, 2 kilowatt capacity minimum |
| Compressed Air Required | 90 psig (7 bar) |
| Work Surface Height | 37 in (95) cm adjustable |
| Overall Size (W x D x H) | 94 x 43 x 54 in (238 x 109 x 137 cm) |
| Total Weight | 1800 lb (816 kg) |
Specifications are subject to change.
Download Datasheet for Model 3150 High Vacuum Furnace
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